抗冲击耐高温微加速度传感器设计

徐春晓[1,2] 房立清[1] 周新伟[1]
[1]军械工程学院火炮工程系,河北石家庄050003 [2]71345部队,山东淄博255000
摘　要:设计了一种耐高温（400℃）、抗过载（20000gn）的SOI微加速度传感器的结构，介绍了传感器的制作工艺，并应用ANSYS软件对其进行了仿真，讨论了传感器的量程、抗冲击能力、灵敏度、横向灵敏度、线性度等各项指标，证明该微传感器满足了设计时所提出的要求。[著者文摘]

Design of micro-acceleration sensor with impact resistance and high-temperature resistanceXU Chun-xiao, FANG Li-qing, ZHOU Xin-wei1. Department of Gun Engineering, Ordnance Engineering College, Shijiazhuang 050003, China;2. 71345 Unit of PLA, Zibo 255000, ChinaAbstract:A sort of SOI micro-acceleration sensor which can endure high temperature （400℃） and overload （20000 gn）are designed, the manufacture and technique of its are introduced, emulation is carried on applying ANSYS. The range, ability to endure impact, sensitivity, sensitivity of landscape orientation, linearity of the sensor are discussed, the results prove the sensor can satisfy the request which is put forward when being designed.[著者文摘]

Key words:high temperature; overload resisitance ; impact resistance; micro-acceleration sensor