高阻计/静电计检定装置的建立及不确定度评定

王晓敏
中国工程物理研究院计量测试中心,四川绵阳621900
摘　要:为了实现对高阻计静电计准确、可靠的校准／检定，特建立高阻计，静电计检定装置。该检定装置由KEITHLEY 263校准仪，源组成，采用直接测量法进行校准，检定工作。通过对其测量不确定度进行详细评定，证明高阻计，静电计检定装置可圆满地实现对KEITHLEY 6517A等高精密静电计，高阻计的校准／检定，从而大大增强了电磁学计量领域高值电阻和微电流等参数的测试能力。[著者文摘]


Establishment and uncertainty evaluation of high resistance meter/electrometer verification equipmentWANG Xiao-min Metrology and Testing Center,China Academy of Engineering Physics,Mianyang 621900,ChinaAbstract:The high resistance meter ＆ electrometer verification equipment was set up in order to achieve accurate and reliable calibration and verification of high resistance meter ＆ electrometer. The high resistance meter ＆ electrometer verification equipment was formed by the KEITHLEY 263 Calibrator ＆ Source. The calibration ＆ verification work used the method of direct measurement. The accurate evaluation of uncertainty indicated that the high resistance meter ＆ electrometer verification equipment could achieve accurate calibration ＆ verification for KEITHLEY6517A, etc. This greatly increased the test ability of high-value resistors and micro-current in the electromagnetic measurement fields.[著者文摘]

Key words:High resistance meter ＆ electrometer verification equipment; Calibration ＆ verification; Direct measurement; Uncertainty ; Evaluation