宫美望[1] 刘文君[2]
[1]青岛市计量测试所,山东青岛266071
[2]青岛市水利勘测设计院有限公司,山东青岛266023
摘 要:在平面等厚干涉仪上检定平晶工作面平面度时,需要在被检区域调整出3到5条干涉条纹,依据测量原理和计算公式求出被检平晶工作面的平面度。文章重点分析干涉条纹的快速调整方法与标准平晶平面度的正确引用方法。[著者文摘]
Quick-adjusting Method of Interference Fringes and Flatness Calculation of Optical Flat Working SurfaceGONG Mei-wang, LIU Wen-jun 1. Qingdao Institute of Measurement and Testing , Qingdao 266071, China; 2. Qingdao Water Conservancy Survey Design Institute Limited Company, Qingdao 266023, ChinaAbstract:Flatness of optical flat working surface was verified by use of plane equal-thickness interferometer. In verification, 3 to 5 interference fringes must be adjusted in measured area, then flatness of optical flat working surface was calcuylated based on measuring principle and foroula. Quick adjusting method of interference fringes and correct quotation method of standard optical flat flatness are analyzed.[著者文摘]
Key words:equal-thickness interference; interference fringe; adjusting method; flatness; calculation |
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