辐射测厚仪测量精度分析与误差补偿技术

朱建芳[1] 梁煦宏[2][1]广州航海高等专科学校,广州510725 [2]广东省测试分析研究所,广州510070
摘　要:简单介绍了透射式辐射测厚原理,分析与研究了影响辐射测厚仪测量精度的各种因素.为了保证和提高测量精度,利用分段多项式曲线拟合与查表线性插值相结合的方法实现非线性补偿,利用软件查表法对测量气隙进行动态的温度补偿,利用内藏标样进行动态自动校正以实现综合误差补偿.实际应用表明,辐射测厚仪经过上述误差补偿后,测量范围广、测量精度高、性能稳定可靠、应用广泛.[著者文摘]

Accuracy Analysis and Error Compensation Technique of the Radiation Thickness GaugeZhu Jianfang, Liang Xuhong　Zhu Jianfang, Liang Xuhong　Abstract:The measuring principle of a transmissive radiation thickness gauge is introduced briefly. The factors that may influence the accuracy of the gauge are studied and analyzed. To ensure and improve the measurement accuracy,piecewise polynomial curve fitting method combined with table searching and linear interpolation is used to implement the non-linearity compensation. The software table searching method is used to implement dynamic temperature compensation for the measuring air gap,and internal sampling for automatic dynamic adjustment is adopted to implement integrated error compensation. The results of practical operation show that the thickness gauge with above compensations offers wide t range, high measurement accuracy, stable performance, and various applicable areas.[著者文摘]

Key words:Radiation thickness gauge Error compensation Sensitivity Non-linearity compensation